MICRO ELECTROMECHANICAL DEVICE FOR TILTING A BODY IN TWO DEGREES OF FREEDOM

The invention relates to a micro electromechanical device (1') for tilting a body (2) in two degrees of freedom comprising a carrier element (3) and a membrane (4), the body (2) being connected via the membrane (4) to the carrier element (3), wherein the body (2) and the carrier element (3) eac...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	VAN LIEROP, DIEDERIK, ASJES, RONALD, J, VAN GRUNSVEN, ERIC, C., E, MEUWESE, MARK, T, JANSEN, GERARDUS, L., M, BROUWER, DANNIS, M
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS TRANSPORTING
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