FLEXIBLE HYBRID DEFECT CLASSIFICATION FOR SEMICONDUCTOR MANUFACTURING

Hybrid methods for classifying defects in semiconductor manufacturing are provided. The methods include applying a flexible sequence of rules for defects to inspection data. The sequence of rules includes deterministic rules, statistical rules, hybrid rules, or some combination thereof. The rules in...

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Hauptverfasser:	KINI, VIVEKANAND, RANDALL, DAVID, ZHANG, JIANXIN, WU, KENONG, TRIBBLE, ARIEL, KULKARNI, ASHOK, BHAGWAT, SANDEEP, MCCAULEY, SHARON, SHANBHAG, MARUTI, HUET, PATRICK, KOWALSKI, MICHAL, GAO, LISHENG, CAMPOCHIARO, CECELIA, ANNE, HUANG, TONG
Format:	Patent
Sprache:	eng ; fre
Online-Zugang:	Volltext bestellen
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