ELECTRON BEAM SOURCE, AND ELECTRON-BEAM APPLICATION DEVICE

An electron gun having a simple configuration and a small aberration. A magnetic-field superposed electron source comprising an electric field radiation type electron source (4) having a leading end portion of a diameter of not more than 100 nm and immersed in a magnetic field, and an outgoing elect...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	FUJIEDA, TADASHI, HAYASHIBARA, MITSUO, TODOKORO, HIDEO, OHSHIMA, TAKASHI, HIDAKA, KISHIO
Format:	Patent
Sprache:	eng ; fre ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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