EXPOSURE EQUIPMENT

A stage member having a high resistance and resonance frequency against torsional oscillation is provided. The stage member has a honeycomb structure wherein a square pole shaped space part is provided and a wall constituting the space part is arranged vertical to a torsional deformation direction....

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SUGAYA, TOMOYUKI, ISHII, MAMORU, MORIYAMA, SHIROU, HIROSE, MASATAKA, UMEZU, MOTOHIRO, OHMI, TADAHIRO, SASAKI, SHUNICHI, TAKEHISA, KIWAMU, KATAOKA, MASAKO
Format:	Patent
Sprache:	eng ; fre ; jpn
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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