BUILDING UP DIFFRACTIVE OPTICS BY STRUCTURED GLASS COATING

The invention relates to optical parts, and in particular to a process for applying an optically active structuring (7) to a substrate (1), and also to a component produce using a process of this type. The process for applying an optically active structuring to a substrate comprises in particular ph...

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Hauptverfasser: MUND, DIETRICH, HAMMERL, KLAUS, MICHAEL
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HAMMERL, KLAUS, MICHAEL
description The invention relates to optical parts, and in particular to a process for applying an optically active structuring (7) to a substrate (1), and also to a component produce using a process of this type. The process for applying an optically active structuring to a substrate comprises in particular photolithographic techniques and the deposition of material via physical vapor deposition processes. Cette invention concerne des pièces optiques et, en particulier, un procédé pour appliquer une structure optiquement active (7) sur un substrat (1), ainsi qu'un composant produit au moyen d'un procédé de ce type. Ce procédé, qui sert à appliquer une structure optiquement active sur un substrat, utilise notamment des techniques de photolithographie et le dépôt de matière par les techniques de dépôt en phase vapeur par procédé chimique.
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subjects APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS
HOLOGRAPHY
MATERIALS THEREFOR
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
TECHNICAL SUBJECTS COVERED BY FORMER USPC
TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
title BUILDING UP DIFFRACTIVE OPTICS BY STRUCTURED GLASS COATING
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