METHOD AND SYSTEM FOR SUPPLYING CARBON DIOXIDE

Provided is a novel method and system for supplying high-pressure carbon dioxide to an application having a variable carbon dioxide flow requirement. The method includes providing a high-pressure carbon dioxide feed stream to a buffer volume (80) and determining the amount of carbon dioxide to be d...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	JOHNSON, MICHAEL, CLINTON, TIMM, MARTIN, L, BILLINGHAM, JOHN, FREDRIC
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS BLASTING CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMICAL SURFACE TREATMENT CHEMISTRY CLEANING CLEANING IN GENERAL CLEANING OR DEGREASING OF METALLIC MATERIAL BY CHEMICALMETHODS OTHER THAN ELECTROLYSIS COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOUNDS THEREOF DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED,LIQUEFIED, OR SOLIDIFIED GASES FIXED-CAPACITY GAS-HOLDERS HEATING INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INORGANIC CHEMISTRY LIGHTING MECHANICAL ENGINEERING METALLURGY NON-METALLIC ELEMENTS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES STORING OF DISTRIBUTING GASES OR LIQUIDS THEIR RELEVANT APPARATUS TRANSPORTING VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED ORSOLIDIFIED GASES WEAPONS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	Provided is a novel method and system for supplying high-pressure carbon dioxide to an application having a variable carbon dioxide flow requirement. The method includes providing a high-pressure carbon dioxide feed stream to a buffer volume (80) and determining the amount of carbon dioxide to be delivered to the application tool (100). The pressure in the buffer volume (80) is maintained at a pressure that exceeds the pressure required by the application tool (100). The temperature in the buffer volume (80) is further adjusted to modify the density of the carbon dioxide and based thereon the size of the buffer volume (80). Thereafter, the carbon dioxide from the buffer volume (80) is delivered at a variable flow rate as required by the application tool (100). Cette invention concerne un nouveau procédé et un nouveau système permettant d'alimenter en dioxyde de carbone haute pression une application dont les exigences en matière de flux de dioxyde de carbone sont variables. Ce procédé consiste à introduire un courant d'alimentation en dioxyde de carbone haute pression dans un volume tampon (80) et à déterminer quelle quantité de dioxyde de carbone doit être fournie à l'outil d'application (100). La pression mesurée dans le volume tampon (80) est maintenue à un niveau dépassant la pression requise par l'outil d'application (100). La température mesurée dans le volume tampon (80) est également ajustée pour que la densité du dioxyde de carbone soit modifiée, la taille du volume tampon (80) dépendant de celle-ci. Le dioxyde de carbone issu du volume tampon (80) est ensuite fourni selon un débit variable requis par l'outil d'application (100).