TIP STRUCTURE FOR SCANNING DEVICES, METHOD OF ITS PREPARATION AND DEVICES THEREON

The design of a probe and an instrument on its basis suggested in the present invention solve near-field optical microscopy and near-field infrared microscopy problems. Also the new method of probe manufacture suggested in this invention allows one to considerably reduce the cost of the final produc...

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Hauptverfasser: GIVARGIZOV, MICHAIL EVGEN'EVICH, GIVARGIZOV, EVGENY INVIEVICH
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creator GIVARGIZOV, MICHAIL EVGEN'EVICH
GIVARGIZOV, EVGENY INVIEVICH
description The design of a probe and an instrument on its basis suggested in the present invention solve near-field optical microscopy and near-field infrared microscopy problems. Also the new method of probe manufacture suggested in this invention allows one to considerably reduce the cost of the final product and, thus, considerably increase the number of its possible users. The probe design suggested in this invention and the instrument based on these probes allow one to optically record and read the information and also to perform lithography works, in particular, the works with exposure of a photoresist at a nanometer resolution. L'invention porte sur modèle de sonde, et sur un instrument comportant cette sonde, permettant de résoudre certains problèmes de la microscopie photonique en champ proche et de la microscopie infrarouge en champ proche. L'invention concerne également un nouveau procédé de production permettant de réduire considérablement le coût de production final, et d'augmenter ainsi le nombre d'utilisateurs potentiel de cette sonde et de cet instrument. Le modèle de sonde décrit, et l'instrument équipé de ces sondes permettent l'enregistrement optique et la lecture d'informations, ainsi que l'exécution de travaux de lithographie, en particuliers des travaux comprenant l'exposition d'une photorésine, avec une résolution nanométrique.
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subjects APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]
MANUFACTURE OR TREATMENT THEREOF
MEASURING
NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS,MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES ASDISCRETE UNITS
NANOTECHNOLOGY
PERFORMING OPERATIONS
PHYSICS
SCANNING-PROBE TECHNIQUES OR APPARATUS
TESTING
TRANSPORTING
title TIP STRUCTURE FOR SCANNING DEVICES, METHOD OF ITS PREPARATION AND DEVICES THEREON
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