TIP STRUCTURE FOR SCANNING DEVICES, METHOD OF ITS PREPARATION AND DEVICES THEREON

The design of a probe and an instrument on its basis suggested in the present invention solve near-field optical microscopy and near-field infrared microscopy problems. Also the new method of probe manufacture suggested in this invention allows one to considerably reduce the cost of the final produc...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	GIVARGIZOV, MICHAIL EVGEN'EVICH, GIVARGIZOV, EVGENY INVIEVICH
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] MANUFACTURE OR TREATMENT THEREOF MEASURING NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS,MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES ASDISCRETE UNITS NANOTECHNOLOGY PERFORMING OPERATIONS PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	The design of a probe and an instrument on its basis suggested in the present invention solve near-field optical microscopy and near-field infrared microscopy problems. Also the new method of probe manufacture suggested in this invention allows one to considerably reduce the cost of the final product and, thus, considerably increase the number of its possible users. The probe design suggested in this invention and the instrument based on these probes allow one to optically record and read the information and also to perform lithography works, in particular, the works with exposure of a photoresist at a nanometer resolution. L'invention porte sur modèle de sonde, et sur un instrument comportant cette sonde, permettant de résoudre certains problèmes de la microscopie photonique en champ proche et de la microscopie infrarouge en champ proche. L'invention concerne également un nouveau procédé de production permettant de réduire considérablement le coût de production final, et d'augmenter ainsi le nombre d'utilisateurs potentiel de cette sonde et de cet instrument. Le modèle de sonde décrit, et l'instrument équipé de ces sondes permettent l'enregistrement optique et la lecture d'informations, ainsi que l'exécution de travaux de lithographie, en particuliers des travaux comprenant l'exposition d'une photorésine, avec une résolution nanométrique.