IMPRINTING METHOD FOR MAKING PHOTONIC STRUCTURES

Photonic crystal structures are made by a method including steps of providing a substrate (S10), depositing a multilayer stack of substantially identical planar layers (S20), each planar layer comprising two or more sublayers, depositing (S50) and patterning (S60) a layer of imprintable material by...

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Hauptverfasser: STASIAK, JAMES, PETERS, KEVIN, F, COULMAN, DONALD, J, CRUZ-URIBE, TONY, CHAMPION, DAVID
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creator STASIAK, JAMES
PETERS, KEVIN, F
COULMAN, DONALD, J
CRUZ-URIBE, TONY
CHAMPION, DAVID
description Photonic crystal structures are made by a method including steps of providing a substrate (S10), depositing a multilayer stack of substantially identical planar layers (S20), each planar layer comprising two or more sublayers, depositing (S50) and patterning (S60) a layer of imprintable material by imprinting, and etching a regular array of openings through the multilayer stack (S70). L'invention porte sur des structures photoniques cristallines obtenues selon un procédé consistant à former un substrat (S10), déposer une pile multicouche de couches planes sensiblement identiques (S20), chaque couche plane comprenant au moins deux sous-couches, déposer (S50) et modeler (S60) une couche de matériau imprimable par impression et gravure d'un réseau régulier d'orifices dans la pile multicouche (S70).
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subjects APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
title IMPRINTING METHOD FOR MAKING PHOTONIC STRUCTURES
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