TWO STAGE SCROLL VACUUM PUMP

Vacuum pumping apparatus includes a scroll set having an inlet and an outlet. The scroll set includes a first stationary scroll blade (164) and a second stationary scroll blade (170) extending from a stationary plate (16) and separated by a gap (178), and an orbiting scroll (32) extending from an or...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CURRY, ROBERT, M., JR, WARREN, JEFFREY, C, LIEPERT, ANTHONY, G
Format: Patent
Sprache:eng ; fre
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