MEMS MEMBRANE BASED SENSOR

A micro-electro-mechanical system (MEMS) device is described having a membrane which can be induced to resonate and the frequency of its resonance can be monitored. Chemical moieties can be attached to the membrane, and these moieties can be selected such that they have an affinity for molecules of...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NEUMANN, JOHN, BARTKOVSKY, MICHAEL, HAUAN, STEINAR, GABRIEL, KAIGHAM, J, PRZYBYCIEN, TODD, M
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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