PROCESS CONTROL AT AN INTERCONNECT LEVEL

A method and an apparatus for performing process control at an interconnect level. A process step upon a workpiece is performed. Manufacturing data relating to an interconnet location on the workpiece is acquired. An interconnect characteristic control process is performed based upon the manufacturi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CHONG, ROBERT, J, GREEN, ERIC, O
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING SEMICONDUCTOR DEVICES
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