IMPROVEMENTS TO SHOWERHEADS

A showerhead (5) for substrate processing including a gas (8) inlet leading to a gas reservoir (10). A faceplate (5) including a plurality of orifices (9) is fitted between the reservoir and a processing space (11). The showerhead further includes a sheet (16) including a plurality of orifices (18),...

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Bibliographische Detailangaben
1. Verfasser:	SCHLOTTMAN, OLE
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	A showerhead (5) for substrate processing including a gas (8) inlet leading to a gas reservoir (10). A faceplate (5) including a plurality of orifices (9) is fitted between the reservoir and a processing space (11). The showerhead further includes a sheet (16) including a plurality of orifices (18), the sheet orifices being smaller in size than the minimum diameter of the faceplate orifices. The sheet is fitted in or on the showerhead such that the fluid passes to the process space from the reservoir via the sheet orifices. L'invention concerne une pomme d'arrosoir (5) conçue pour le traitement de substrats et présentant une entrée de gaz (8) conduisant à un réservoir de gaz (10). Un plateau à trous (5) comprenant une pluralité d'orifices (9) est logé entre le réservoir et un espace de traitement (11). La pomme d'arrosoir comprend également une feuille (16) présentant une pluralité d'orifices (18), les orifices de la feuille étant plus petits en dimensions que le diamètre minimum des orifices du plateau à trous. La feuille est fixée à la surface de la pomme d'arrosoir ou est logée à l'intérieur de celle-ci de sorte que le fluide passe du réservoir vers l'espace de traitement par les orifices de la feuille.