EMISSIVITY CORRECTED RADIATION PYROMETER INTEGRAL WITH A REFLECTOMETER AND ROUGHNESS SENSOR FOR REMOTE MEASURING OF TRUE SURFACE TEMPERATURES
An instrument that measures reflectivity, temperature and roughness of a substrate in a processing chamber remotely, without interfering with the process. The roughness of the substrate is estimated on the basis of depolarization measurements. The instrument automatically corrects for emissivity cha...
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| creator | CHAMPETIER, ROBERT, J |
| description | An instrument that measures reflectivity, temperature and roughness of a substrate in a processing chamber remotely, without interfering with the process. The roughness of the substrate is estimated on the basis of depolarization measurements. The instrument automatically corrects for emissivity changes.
Instrument permettant de mesurer à distance la réflexivité, la température et la rugosité d'un substrat dans une chambre de traitement, sans interférer avec le processus en cours. La rugosité du substrat est estimée en se basant sur des mesures de dépolarisation. Cet instrument corrige automatiquement les variations d'émissivité. |
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Instrument permettant de mesurer à distance la réflexivité, la température et la rugosité d'un substrat dans une chambre de traitement, sans interférer avec le processus en cours. La rugosité du substrat est estimée en se basant sur des mesures de dépolarisation. Cet instrument corrige automatiquement les variations d'émissivité.</description><edition>7</edition><language>eng ; fre</language><subject>COLORIMETRY ; MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT ; MEASURING ; PHYSICS ; RADIATION PYROMETRY ; TESTING</subject><creationdate>2004</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20040129&DB=EPODOC&CC=WO&NR=2004010094A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25555,76308</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20040129&DB=EPODOC&CC=WO&NR=2004010094A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>CHAMPETIER, ROBERT, J</creatorcontrib><title>EMISSIVITY CORRECTED RADIATION PYROMETER INTEGRAL WITH A REFLECTOMETER AND ROUGHNESS SENSOR FOR REMOTE MEASURING OF TRUE SURFACE TEMPERATURES</title><description>An instrument that measures reflectivity, temperature and roughness of a substrate in a processing chamber remotely, without interfering with the process. The roughness of the substrate is estimated on the basis of depolarization measurements. The instrument automatically corrects for emissivity changes.
Instrument permettant de mesurer à distance la réflexivité, la température et la rugosité d'un substrat dans une chambre de traitement, sans interférer avec le processus en cours. La rugosité du substrat est estimée en se basant sur des mesures de dépolarisation. Cet instrument corrige automatiquement les variations d'émissivité.</description><subject>COLORIMETRY</subject><subject>MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT</subject><subject>MEASURING</subject><subject>PHYSICS</subject><subject>RADIATION PYROMETRY</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2004</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNizEKwkAURNNYiHqHD9bCqmksP3E2Wcjuhr8_ipWIrJWooNfwzqbIASyGYXhvpsUX3qXkDk5PVEURVIo9Ce8dq4uBupNED4WQC4pauKWj04aYBLYd7JFyGF6xr5uAlCghpChkhwh8VJAHp15cqClaUulBw7RcgRS-g7D2gjQvJrfL_Z0XY8-KpYVWzSq_nuf8fl2u-ZE_52PcGFOatTG7ktfb_6wfIElBaw</recordid><startdate>20040129</startdate><enddate>20040129</enddate><creator>CHAMPETIER, ROBERT, J</creator><scope>EVB</scope></search><sort><creationdate>20040129</creationdate><title>EMISSIVITY CORRECTED RADIATION PYROMETER INTEGRAL WITH A REFLECTOMETER AND ROUGHNESS SENSOR FOR REMOTE MEASURING OF TRUE SURFACE TEMPERATURES</title><author>CHAMPETIER, ROBERT, J</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_WO2004010094A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre</language><creationdate>2004</creationdate><topic>COLORIMETRY</topic><topic>MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT</topic><topic>MEASURING</topic><topic>PHYSICS</topic><topic>RADIATION PYROMETRY</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>CHAMPETIER, ROBERT, J</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>CHAMPETIER, ROBERT, J</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>EMISSIVITY CORRECTED RADIATION PYROMETER INTEGRAL WITH A REFLECTOMETER AND ROUGHNESS SENSOR FOR REMOTE MEASURING OF TRUE SURFACE TEMPERATURES</title><date>2004-01-29</date><risdate>2004</risdate><abstract>An instrument that measures reflectivity, temperature and roughness of a substrate in a processing chamber remotely, without interfering with the process. The roughness of the substrate is estimated on the basis of depolarization measurements. The instrument automatically corrects for emissivity changes.
Instrument permettant de mesurer à distance la réflexivité, la température et la rugosité d'un substrat dans une chambre de traitement, sans interférer avec le processus en cours. La rugosité du substrat est estimée en se basant sur des mesures de dépolarisation. Cet instrument corrige automatiquement les variations d'émissivité.</abstract><edition>7</edition><oa>free_for_read</oa></addata></record> |
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| subjects | COLORIMETRY MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING PHYSICS RADIATION PYROMETRY TESTING |
| title | EMISSIVITY CORRECTED RADIATION PYROMETER INTEGRAL WITH A REFLECTOMETER AND ROUGHNESS SENSOR FOR REMOTE MEASURING OF TRUE SURFACE TEMPERATURES |
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