TRANSITION FLOW TREATMENT PROCESS AND APPARATUS

A method is provided for treating an object. In this method, a treating chemical is introduced to a bath under conditions effective to at least partially envelop the object to be treated in eddy currents of the bath liquid, followed by introducing non-treating liquid into the bath under conditions e...

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Bibliographische Detailangaben
Hauptverfasser:	MICHALKO, GARY, W, LEE, NAM, PYO, CHRISTENSON, KURT, K, RATHMAN, CHRISTINA, A
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS TRANSPORTING
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Beschreibung
Zusammenfassung:	A method is provided for treating an object. In this method, a treating chemical is introduced to a bath under conditions effective to at least partially envelop the object to be treated in eddy currents of the bath liquid, followed by introducing non-treating liquid into the bath under conditions effective to at least partially envelope the object to be treated in eddy currents of the bath liquid. An apparatus for carrying out this method is also provided. This method is particularly beneficial for objects used in precision manufacturing by treatment with solutions, such as semiconductor wafers or similar substrates. La présente invention concerne un procédé de traitement d'un objet. Dans ledit procédé, un agent chimique de traitement est introduit dans un bain dans des conditions efficaces de manière à au moins en partie envelopper l'objet à traiter dans des courants de Foucault du liquide de bain, puis un liquide de non traitement est introduit dans le bain dans des conditions eficaces de manière à au moins en partie envelopper l'objet à traiter dans des courants de Foucault du liquide de bain. L'invention concerne également un appareil permettant de mettre en oeuvre ledit procédé. Ledit procédé est particulièrement avantageuse pour des objets utilisés dans la fabrication de précision par traitement à l'aide de solutions, tels que des plaquettes à semi-conducteurs ou des substrats semblables.