USE OF ELECTRONIC SPECKLE INTERFEROMETRY FOR DEFECT DETECTION IN FABRICATED DEVICES

Electronic speckle interferometry is used to detect submicron-sized indication in fabricated devices, such as membranes. Indications include indentations, deformations or defects. For example, disbonds between a membrane surface and a bonded edge surface can be detected. An acoustic source can be us...

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Bibliographische Detailangaben

Hauptverfasser:	PETERSON, MICHAEL, L., JR, DILEO, ANTHONY, J
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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