FUSED SILICA HAVING HIGH INTERNAL TRANSMISSION AND LOW BIREFRINGENCE

Fused silica members having high internal transmission and low birefringence are disclosed. Methods of making such fused silica members are also disclosed. According to the present invention, fused silica members having an internal transmission equal to or greater than 99.65%/cm at 193 nm and having...

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Bibliographische Detailangaben
Hauptverfasser:	MAXON, JOHN E, DOMEY, JEFFREY J, SEMPOLINSKI, DANIEL R, LADISON, JULIE L, LINDER, MICHAEL W, HESLIN, MICHAEL R, MOLL, JOHANNES, PAVLIK, JR., ROBERT S
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS CHEMISTRY CINEMATOGRAPHY ELECTROGRAPHY GLASS HOLOGRAPHY JOINING GLASS TO GLASS OR OTHER MATERIALS MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES MATERIALS THEREFOR METALLURGY MINERAL OR SLAG WOOL OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS SURFACE TREATMENT OF GLASS
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Beschreibung
Zusammenfassung:	Fused silica members having high internal transmission and low birefringence are disclosed. Methods of making such fused silica members are also disclosed. According to the present invention, fused silica members having an internal transmission equal to or greater than 99.65%/cm at 193 nm and having an absolute maximum birefringence along the use axis of less than or equal to 0.75 nm/cm are provided. L'invention concerne des articles en silice fondue qui présentent une forte transmission interne et une faible biréfringence. L'invention concerne également des procédés de fabrication de ces articles en silice fondue. L'invention fournit également des articles en silice préfondue dont la transmission interne est égale ou supérieure à 99,65 %/cm à 193 nm et la biréfringence maximum absolue le long de l'axe utile inférieure ou égale à 0,75 nm/cm.