IMPROVED MATERIAL FOR USE WITH FERROELECTRICS

A liner layer comprising TiO2 enriched SRO is disclosed. The TiO2 enriched SRO liner improves the reliability of ferroelectric materials such as PZT without adversely impacting or degrading the ferroelectric properties of the PZT. The SRTO, in one embodiment is sputtered using an SRO target doped wi...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	BRUCHHAUS, RAINER
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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