OPTICAL DISPLACEMENT SENSOR

An optical displacement sensor (10) is provided for optically measuring the static and dynamic displacement of one or more reflectors (110) that can be integrated in electronics and optics applications. The sensor includes an optically transparent substrate (140) and a reflective grating (100) depos...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YARALIOGLU, GOKSEN, G, KHURI-YAKUB, BUTRUS, THOMAS, DEGERTEKIN, FAHRETTIN, LEVENT
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS MEASURING MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS TARIFF METERING APPARATUS TESTING
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