A RESONATOR-TYPE MICROELECTRONIC PRESSURE SENSOR THAT WITHSTANDS HIGH PRESSURES

A RESONATOR-TYPE MICROELECTRONIC PRESSURE SENSOR THAT WITHSTANDS HIGH PRESSURES

A microelectronic pressure sensor comprises a resonator (23) made on the basis of a crystalline material and secured to the inside of a package (24) made use of a cap (27) and a baseplate (26) for assembling one to the other. The cap (27) and the baseplate (26) are made completely or almost complete...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LELONG-FENEYROU, SANDRINE, BINET, FLORENCE, DONZIER, ERIC
Format: Patent
Sprache:eng ; fre
Schlagworte:
MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:A microelectronic pressure sensor comprises a resonator (23) made on the basis of a crystalline material and secured to the inside of a package (24) made use of a cap (27) and a baseplate (26) for assembling one to the other. The cap (27) and the baseplate (26) are made completely or almost completely out of the same material as the resonator (23), and the pressure (Pe) to be detected is applied all around the package. L'invention concerne un détecteur de pressions micro-électroniques comprenant un résonateur (23) constitué d'une matière cristalline et fixé sur la partie interne d'un emballage (24) composé d'un couvercle (27) et d'une plaque de base (26) à assembler. Le couvercle (27) et la plaque de base (26) sont entièrement ou presqu'entièrement constitués de la même matière que le résonateur (23), et la pression (Pe) à déceler est appliquée tout autour de l'emballage.