A POWER DISTRIBUTION PRINTED CIRCUIT BOARD FOR A SEMICONDUCTOR PROCESSING SYSTEM

A semiconductor processing system including a printed circuit board structure for delivering power to an assembly of radiant energy sources. The printed circuit board structure, in one configuration, forms an evacuable housing for the assembly of radiant energy sources. L'invention concerne un...

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Bibliographische Detailangaben
Hauptverfasser:	BOAS, RYAN, C, STEFFAS, PAUL, J
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	A semiconductor processing system including a printed circuit board structure for delivering power to an assembly of radiant energy sources. The printed circuit board structure, in one configuration, forms an evacuable housing for the assembly of radiant energy sources. L'invention concerne un système de traitement semi-conducteur comprenant une structure de carte de circuit imprimé permettant d'alimenter de la puissance à un ensemble de sources d'énergie rayonnante. La structure de carte de circuit imprimé, dans une configuration, forme un logement évacuable destiné à l'ensemble de sources d'énergie rayonnante.