SYSTEM AND METHOD FOR AUTOMATED MONITORING AND ASSESSMENT OF FABRICATION FACILITY

A method for monitoring and assessing operation of a semiconductor fabrication facility (800) comprises the steps of connecting a monitoring and assessment system (107) to a system bus (105) which is connected directly or indirectly to a manufacturing execution system (102) and a plurality of semiconductor fabrication tools. Through a user interface (820), the state models (815) can be configured for the semiconductor fabrication tools where each state model (815) is based upon a set of definned triggers (805) for each tool. During monitoring, various messages (803, 804) are transmitted on the system bus (105) between the semiconductor fabrication tools and the manufacturing execution system (102) and the monitoring and assessment system (107), and appropriate triggers are generated based upon the messages (803, 804) where the triggers are selected from a set of defined triggers (805). During operation, the state models (815) are updated for each tool affected by one of the triggers and transitions within the state models (815) are recorded in a tracking database (830). A method for monitoring and assessing operation of a semiconductor fabrication facility comprises the steps of connecting a monitoring and assessment system to a system bus which is connected directly or indirectly to a manufacturing execution system and a plurality of semiconductor fabrication tools. Through a user interface, the state models can be configured for the semiconductor fabrication tools where each state model is based upon a set of definned triggers for each tool. During monitoring various messages are transmitted on the system bus between the semiconductor fabrication tools and the manufacturing execution system and the monitoring and assessment system, and appropriate triggers are generated based upon the messages where the triggers are selected from a set of defined triggers. During operation, the state models are updated for each tool affected by one of the triggers and transitions within the state models are recorded in a tracking database. La présente invention concerne un procédé de contrôle et d'évaluation du fonctionnement d'une unité de fabrication de semi-conducteurs comportant des étapes de connexion d'un système de contrôle et d'évaluation à un système à bus qui est relié directement ou indirectement à un système d'exécution de fabrication et une pluralité d'outils de fabrication de semi-conducteurs. Par l'intermédiaire d'une interface d'utilisateur, les modèles à