SEGMENTING OF PROCESSING SYSTEM INTO WET AND DRY AREAS

A method and apparatus for processing a substrate is described. In one aspect, a processing system is provided which includes a wet area and a dry area. In another aspect, a method comprises processing the substrate in the process cell. The substrate is transferred from the process cell to a dry mod...

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Bibliographische Detailangaben
Hauptverfasser:	HEY, H., PETER, W, SUGARMAN, MICHAEL, N, DENOME, MARK
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	APPARATUS THEREFOR BASIC ELECTRIC ELEMENTS CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS CHEMISTRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROFORMING ELECTROLYTIC OR ELECTROPHORETIC PROCESSES MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS METALLURGY PRINTED CIRCUITS PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	A method and apparatus for processing a substrate is described. In one aspect, a processing system is provided which includes a wet area and a dry area. In another aspect, a method comprises processing the substrate in the process cell. The substrate is transferred from the process cell to a dry module and then transferring the substrate to a drying area. L'invention concerne un procédé et un appareil de traitement d'un substrat. Elle concerne en particulier, selon un aspect, un système de traitement comprenant une aire humide et une aire sèche. Selon un autre aspect, elle concerne un procédé consistant à traiter le substrat dans la cellule de traitement. Le substrat est transféré de la cellule de traitement vers un module sec, le substrat étant ensuite transféré vers une aire de séchage.