SYSTEMS AND METHODS FOR INSPECTION OF SPECIMEN SURFACES

Systems and methods for contact image sensor CIS based inspection of specimens are provided. A system configured to inspect a specimen may include a contact image sensor. The contact image sensor may include a light source configured to direct light toward a surface of the specimen and a linear sens...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YOUNG, LYDIA, J, ROSENGAUS, ELIEZER
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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