FABRICATION OF INTEGRATED MODULATED WAVEGUIDE STRUCTURES

FABRICATION OF INTEGRATED MODULATED WAVEGUIDE STRUCTURES

A self-aligning process for fabricating integrated modulated waveguide structures includes laying a resist mask which includes defining features of both the waveguide and surrounding recesses and manipulating this structure via selective etching whilst protected by further resist layers. This gives...

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Bibliographische Detailangaben
1. Verfasser: VONSOVICI, ADRIAN, PETRU
Format: Patent
Sprache:eng ; fre
Schlagworte:
DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING
FREQUENCY-CHANGING
NON-LINEAR OPTICS
OPTICAL ANALOGUE/DIGITAL CONVERTERS
OPTICAL LOGIC ELEMENTS
OPTICS
PHYSICS
TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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Beschreibung
Zusammenfassung:A self-aligning process for fabricating integrated modulated waveguide structures includes laying a resist mask which includes defining features of both the waveguide and surrounding recesses and manipulating this structure via selective etching whilst protected by further resist layers. This gives the desired waveguide and recessed modulator structure whilst ensuring that the waveguide and the recesses are correctly aligned. L'invention concerne un procédé d'auto-alignement permettant de fabriquer des structures de guide d'ondes modulées monobloc. Ce procédé consiste à poser un masque de résine consistant à définir des caractéristiques d'aussi bien le guide d'ondes que des évidements et à manipuler cette structure, protégée par d'autres couches de résine, par le biais de gravure sélective. Ce procédé permet d'obtenir le guide d'ondes et une structure de modulateur à évidements souhaités, tout en garantissant un alignement correct du guide d'ondes et des évidements.