METHODS AND APPARATUS FOR MAINTAINING A PRESSURE WITHIN AN ENVIRONMENTALLY CONTROLLED CHAMBER

A system including a chamber; (102) a variable speed vacuum pump (204) coupled to the chamber; and a pressure controller (202) coupled to the chamber. The pressure controller (202) compares a set point pressure with a pressure measurement for the chamber and adjusts a flow of gas through the pressur...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	VERDICT, GREGORY, S, PFEIFFER, KENNETH, E
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PHYSICS REGULATING SEMICONDUCTOR DEVICES SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES THEIR RELEVANT APPARATUS TRANSPORTING
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