CERAMIC SUPPORTS AND METHODS

A method of forming a ceramic support (20) for a mask comprises forming a plurality of ceramic ribs (22), a plurality of ceramic strips (24) and a frame (32). Each ceramic rib (22) has a plurality of spaced-apart grooves for receiving the ceramic strips (24). The ceramic ribs (22) are positioned in...

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Bibliographische Detailangaben
1. Verfasser:	CRITTENDEN, JAMES, A
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MANUFACTURE OR TREATMENT OF NANOSTRUCTURES MATERIALS THEREFOR MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES NANOTECHNOLOGY ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES TRANSPORTING
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Beschreibung
Zusammenfassung:	A method of forming a ceramic support (20) for a mask comprises forming a plurality of ceramic ribs (22), a plurality of ceramic strips (24) and a frame (32). Each ceramic rib (22) has a plurality of spaced-apart grooves for receiving the ceramic strips (24). The ceramic ribs (22) are positioned in a spaced apart parallel array, and the ceramic strips (24) are secured in the grooves to form a rectangular grid (30) that is framed by the frame (32). L'invention concerne un procédé de fabrication d'un support céramique (20) destiné à un masque, consistant à former une pluralité de côtes céramiques (22), une pluralité de bandes céramiques (24) et un cadre (32). Chaque côte céramique (22) comporte une pluralité de nervures espacées destinées à recevoir les bandes céramiques (24). Les côtes céramiques (22) sont disposées en configuration parallèle espacée, et les bandes céramiques (24) sont fixées dans les rainures afin de former une grille rectangulaire (30) structurée par le cadre (32).