COATINGS ON REFLECTIVE MASK SUBSTRATES

A process for creating a mask substrate involving depositing: 1) a coating on one or both sides of a low thermal expansion material EUVL mask substrate to improve defect inspection, surface finishing, and defect levels; and 2) a high dielectric coating, on the backside to facilitate electrostatic ch...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TONG, WILLIAM, MAN-WAI, STIVERS, ALAN, R, THOMPSON, MATTHEW, A, TAYLOR, JOHN, HECTOR, SCOTT, D, MANGAT, PAWITTER, J., S, KOFRON, PATRICK, G
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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