Microacoustic component and method for the production thereof

A microacoustic component includes a functional acoustic region, an inner marginal region and an outer marginal region. The cover covers the functional acoustic region and has a thin film and a bearing surface. The inner marginal region is acoustically coupled to the functional acoustic region and t...

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Bibliographische Detailangaben
Hauptverfasser: Bader, Bernhard, Henn, Gudrun
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A microacoustic component includes a functional acoustic region, an inner marginal region and an outer marginal region. The cover covers the functional acoustic region and has a thin film and a bearing surface. The inner marginal region is acoustically coupled to the functional acoustic region and the bearing surface bears directly at least on a part of the inner marginal region.