Method, apparatus, and system for using a cover mask for enabling metal line jumping over MOL features in a standard cell

At least one method, apparatus and system disclosed involves providing an integrated circuit having metal feature flyover over an middle-of-line (MOL) feature. A first location for a non-contact intersection region between a first middle of line (MOL) interconnect feature and a metal feature in a fu...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Neogi, Tuhin Guha, Doman, David, Pritchard, David C, Luning, Scott
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:At least one method, apparatus and system disclosed involves providing an integrated circuit having metal feature flyover over an middle-of-line (MOL) feature. A first location for a non-contact intersection region between a first middle of line (MOL) interconnect feature and a metal feature in a functional cell is determined. A dielectric feature is formed over the first MOL interconnect feature at the first location. The metal feature is formed over the dielectric layer, the dielectric layer providing a predetermined amount of voltage isolation between the first MOL interconnect feature and the metal feature.