System and method for a capacitive thermometer

Various embodiments disclosed herein include a capacitive thermometer including a deflectable membrane and a sense electrode. The deflectable membrane is configured to adjust a capacitive value based on a temperature of the deflectable membrane.

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Bibliographische Detailangaben
Hauptverfasser:	Frischmuth Tobias, Schmid Ulrich, Grille Thomas, Hedenig Ursula, Silvano de Sousa Jonathan, Figueira da Silva Sylvicley, Irsigler Peter
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING QUANTITY OF HEAT MEASURING TEMPERATURE MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS TESTING THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR TRANSPORTING
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Beschreibung
Zusammenfassung:	Various embodiments disclosed herein include a capacitive thermometer including a deflectable membrane and a sense electrode. The deflectable membrane is configured to adjust a capacitive value based on a temperature of the deflectable membrane.