Retaining ring with Shaped Surface

A retaining ring can be shaped by machining or lapping the bottom surface of the ring to form a shaped profile in the bottom surface. The bottom surface of the retaining ring can include flat, sloped and curved portions. The lapping can be performed using a machine that dedicated for use in lapping...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	Doan Trung T, McAllister Douglas R, Zuniga Steven M, Balagani Venkata R, Meyer Stacy, Chen Hung Chih, Allen Aden Martin, Wohlert Martin S, Schmidt Jeffrey P, De Lamenie Romain Beau, Hughes Kerry F, Fong Michael Jon, Lin Jian, Garretson Charles C, Wang James C, Lu Danny Cam Toan, Huey Sidney P, Oh Jeonghoon
Format:	Patent
Sprache:	eng
Schlagworte:	DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING TRANSPORTING
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Beschreibung
Zusammenfassung:	A retaining ring can be shaped by machining or lapping the bottom surface of the ring to form a shaped profile in the bottom surface. The bottom surface of the retaining ring can include flat, sloped and curved portions. The lapping can be performed using a machine that dedicated for use in lapping the bottom surface of retaining rings. During the lapping the ring can be permitted to rotate freely about an axis of the ring. The bottom surface of the retaining ring can have curved or flat portions.