Surface treatment apparatus, and surface treatment method

According to an embodiment, a surface treatment apparatus includes a surface treatment portion, a supporter, and a carrying portion. The surface treatment portion has a treatment surface. The supporter has a support surface facing a second surface opposite to the first surface of the work. A frictio...

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Bibliographische Detailangaben
Hauptverfasser: Sasaki Sadayuki, Nakamura Yoshihide, Ikeya Yukihiro, Miyauchi Ko
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:According to an embodiment, a surface treatment apparatus includes a surface treatment portion, a supporter, and a carrying portion. The surface treatment portion has a treatment surface. The supporter has a support surface facing a second surface opposite to the first surface of the work. A frictional coefficient of the second surface and the support surface is higher than a frictional coefficient of the first surface and the treatment surface. The carrying portion applies a load in a direction in which the support surface is relatively pressed on the treatment surface, moves the support surface in a carrying direction different from the direction of the load, and thereby moves the work in the carrying direction.