Lighting domes with reflective gradient and broad spectrum light source

Lighting domes with reflective gradient and broad spectrum light source

A lighting dome that can be used to inspect semiconductor wafers can include a small aperture, backlighting, a reflectance gradient and/or a broad spectrum light source.

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Chatterjee Romik, Eastlund Robert Martin, Koci Christopher Jan, Finley Archer Forrest
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
COLORIMETRY
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT
MEASURING
PHYSICS
RADIATION PYROMETRY
TESTING
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:A lighting dome that can be used to inspect semiconductor wafers can include a small aperture, backlighting, a reflectance gradient and/or a broad spectrum light source.