Forming a stress compensation layer and structures formed thereby

Methods of forming a microelectronic structure are described. Those methods comprise forming a stress compensation layer on a substrate, forming at least one opening within the stress compensation layer, and forming an interconnect paste within the at least one opening.

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Bibliographische Detailangaben
Hauptverfasser: Suh Daewoong, Jayaraman Saikumar
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Methods of forming a microelectronic structure are described. Those methods comprise forming a stress compensation layer on a substrate, forming at least one opening within the stress compensation layer, and forming an interconnect paste within the at least one opening.