Methods for forming a lens plate for an integrated camera using UV-transparent molds and methods for forming UV-transparent molds

Suspended lenses in a spacer wafer and lens-in-a-pocket structures are replicated from UV-transparent molds. The fabrication of UV-transparent molds can include providing a substrate with pedestals, fabricating a lens on each pedestal using a step-and-repeat process, replicating an intermediate mold...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Barnes George, Rauker Goran, Fan Regis
Format: Patent
Sprache:eng
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