Methods for forming a lens plate for an integrated camera using UV-transparent molds and methods for forming UV-transparent molds

Suspended lenses in a spacer wafer and lens-in-a-pocket structures are replicated from UV-transparent molds. The fabrication of UV-transparent molds can include providing a substrate with pedestals, fabricating a lens on each pedestal using a step-and-repeat process, replicating an intermediate mold from the substrate with pedestals having lenses on the pedestals, and replicating a UV-transparent mold from the intermediate mold. The fabrication of UV-transparent molds can also include providing a substrate with holes, fabricating a lens in each hole and replicating a UV-transparent mold from the substrate with the holes having the lenses.