Modulated super junction power MOSFET devices

Modulated super junction power MOSFET devices

A semiconductor device-e.g., a super junction power MOSFET-includes a number of columns of one type of dopant formed in a region of another type of dopant. Generally speaking, the columns are modulated in some manner. For example, the widths (e.g., diameters) of some columns are greater than the wid...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Tornblad Olof, Pattanayak Deva
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A semiconductor device-e.g., a super junction power MOSFET-includes a number of columns of one type of dopant formed in a region of another type of dopant. Generally speaking, the columns are modulated in some manner. For example, the widths (e.g., diameters) of some columns are greater than the widths of other columns.