Charged particle microscope with vibration detection / correction

Charged particle microscope with vibration detection / correction

A method of using a Charged Particle Microscope (M) comprising: - A specimen holder (H), connected to a positioning stage, for holding a specimen; - A source (9), for producing a beam of charged particles; - An illuminator (1), for directing said beam so as to irradiate the specimen; - A detector (1...

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Hauptverfasser: Van den Oetelaar Johannes Antonius Maria, De Boeij Jeroen, Visscher Albert
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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creator Van den Oetelaar Johannes Antonius Maria
De Boeij Jeroen
Visscher Albert
description A method of using a Charged Particle Microscope (M) comprising: - A specimen holder (H), connected to a positioning stage, for holding a specimen; - A source (9), for producing a beam of charged particles; - An illuminator (1), for directing said beam so as to irradiate the specimen; - A detector (19), for detecting a flux of radiation emanating from the specimen in response to said irradiation, comprising the following steps: - Providing the microscope with an interferential optical position sensor (P1, P2) for determining a position of said specimen holder relative to a reference; - Providing an automatic controller (E) with a time-dependent position signal from said optical position sensor; - Invoking said controller to use said signal to produce a vibration profile for the microscope.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
title Charged particle microscope with vibration detection / correction
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