Charged particle microscope with vibration detection / correction

A method of using a Charged Particle Microscope (M) comprising: - A specimen holder (H), connected to a positioning stage, for holding a specimen; - A source (9), for producing a beam of charged particles; - An illuminator (1), for directing said beam so as to irradiate the specimen; - A detector (19), for detecting a flux of radiation emanating from the specimen in response to said irradiation, comprising the following steps: - Providing the microscope with an interferential optical position sensor (P1, P2) for determining a position of said specimen holder relative to a reference; - Providing an automatic controller (E) with a time-dependent position signal from said optical position sensor; - Invoking said controller to use said signal to produce a vibration profile for the microscope.