Semiconductor device with reduced emitter efficiency

A method of producing a semiconductor device includes providing a semiconductor body having a front side 10-1 and a back side, wherein the semiconductor body includes a drift region having dopants of a first conductivity type and a body region having dopants of a second conductivity type complementa...

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Bibliographische Detailangaben
Hauptverfasser: Wagner Wolfgang, Baumgartl Johannes, Komarnitskyy Volodymyr
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A method of producing a semiconductor device includes providing a semiconductor body having a front side 10-1 and a back side, wherein the semiconductor body includes a drift region having dopants of a first conductivity type and a body region having dopants of a second conductivity type complementary to the first conductivity type, a transition between the drift region and the body region forming a pn-junction. The method further comprises: creating a contact groove in the semiconductor body, the contact groove extending into the body region along a vertical direction pointing from the front side to the back side; and filling the contact groove at least partially by epitaxially growing a semiconductor material within the contact groove, wherein the semiconductor material has dopants of the second conductivity type.