Methods of forming transistors with retrograde wells in CMOS applications and the resulting device structures

One illustrative method disclosed herein includes performing a first plurality of epitaxial deposition processes to form a first plurality of semiconductor materials selectively above the N-active region while masking the P-active region, performing a second plurality of epitaxial deposition process...

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Bibliographische Detailangaben
Hauptverfasser: Samavedam Srikanth Balaji, Qi Yi, Vakada Vara G. Reddy, Ganz Michael, Kang Laegu, Khanna Puneet, Eller Manfred, Vemula Sri Charan
Format: Patent
Sprache:eng
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Zusammenfassung:One illustrative method disclosed herein includes performing a first plurality of epitaxial deposition processes to form a first plurality of semiconductor materials selectively above the N-active region while masking the P-active region, performing a second plurality of epitaxial deposition processes to form a second plurality of semiconductor materials selectively above the P-active region while masking the N-active region, forming an N-type transistor in and above the N-active region and forming a P-type transistor in and above the P-active region.