Pressure sensor diaphragm

A pressure sensor includes a pre-formed diaphragm located at the distal end of a pressure sensor. The diaphragm has a convex surface on a first side of the diaphragm which is exposed to a fluid to be measured. A strain gauge is attached to a second surface on the opposite side of the diaphragm. The...

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Bibliographische Detailangaben
Hauptverfasser: Wilson William, Sood Surinder, Neri Joel D
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A pressure sensor includes a pre-formed diaphragm located at the distal end of a pressure sensor. The diaphragm has a convex surface on a first side of the diaphragm which is exposed to a fluid to be measured. A strain gauge is attached to a second surface on the opposite side of the diaphragm. The diaphragm may be deformed to have the convex curvature on the first surface, and heat treated.