Fluid control apparatus

A fluid control apparatus has a reduced number of components and enables simple alteration such as increasing or decreasing the number of lines. Chanel blocks on a lower stage include a plural-line (three-line) passage block disposed over a plurality of lines. The plural-line passage block receives...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Matsuda Takahiro, Koyomogi Mutsunori, Inada Toshiyuki
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:A fluid control apparatus has a reduced number of components and enables simple alteration such as increasing or decreasing the number of lines. Chanel blocks on a lower stage include a plural-line (three-line) passage block disposed over a plurality of lines. The plural-line passage block receives an upper stage over three lines, with each of the lines including an inlet extension of a flow rate controller, and two inlet-side on-off valves arranged in series with the inlet extension. The plural-line passage block has longitudinal passages and transverse passages therein. The longitudinal passages are in communication with passages of the fluid control devices arranged in series per line. The transverse passages are in communication with passages of fluid control devices arranged in adjacent lines.