Light collector mirror carrier

A carrier holds an extreme ultraviolet light source collector mirror. The carrier includes a front panel having an inner surface and an outer surface opposite the inner surface, and defining a through opening that has an edge having a plurality of scallops; a back panel having an inner surface that...

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Bibliographische Detailangaben
Hauptverfasser:	Morse Robert L, Ershov Alexander I, De Dea Silvia, Varga Michael
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CABINETS CINEMATOGRAPHY CLADDING OR PLATING BY SOLDERING OR WELDING CLEANING CLEANING IN GENERAL COFFEE MILLS CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING DESKS DOMESTIC ARTICLES OR APPLIANCES DRAWERS ELECTROGRAPHY FURNITURE GENERAL DETAILS OF FURNITURE HOLOGRAPHY HUMAN NECESSITIES MACHINE TOOLS MATERIALS THEREFOR METAL-WORKING NOT OTHERWISE PROVIDED FOR OFFICE FURNITURE OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS PREVENTION OF FOULING IN GENERAL SOLDERING OR UNSOLDERING SPICE MILLS SUCTION CLEANERS IN GENERAL TABLES TRANSPORTING WELDING WORKING BY LASER BEAM
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Beschreibung
Zusammenfassung:	A carrier holds an extreme ultraviolet light source collector mirror. The carrier includes a front panel having an inner surface and an outer surface opposite the inner surface, and defining a through opening that has an edge having a plurality of scallops; a back panel having an inner surface that faces the front panel and an outer surface opposite the inner surface; and a plurality of posts that are configured to connect the back panel to the front panel and to sandwich a flat rim around the circular boundary of the collector mirror between the inner surface of one of the panels and flanges of the posts. The scallops are positioned around a circumference of the edge and being separated by arcs, where the arcs define a circle that has a diameter that is less than a diameter of the circular boundary of the reflective surface of the collector mirror.