Gas purge unit, load port apparatus, and installation stand for purging container

A gas purge unit includes an intake nozzle 28, a pivotable body 31, and an O-ring 35. The intake nozzle 28 has a nozzle opening 26 flowing out a cleaning gas. The pivotable body 31 is arranged in ring shape to surround a cylindrical projection 28b of the nozzle 28, and is provided with a contact par...

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Bibliographische Detailangaben
Hauptverfasser:	Sasaki Mutsuo, Igarashi Hiroshi, Emoto Jun
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	A gas purge unit includes an intake nozzle 28, a pivotable body 31, and an O-ring 35. The intake nozzle 28 has a nozzle opening 26 flowing out a cleaning gas. The pivotable body 31 is arranged in ring shape to surround a cylindrical projection 28b of the nozzle 28, and is provided with a contact part 34 capable of detachably contacting with an intake port 5 on a tip portion of the pivotable body 31. The ring-shaped O-ring 33 is held between a rear end of the pivotable body 31 and a base portion 28a of the nozzle 28 in a compressively elastically deformable manner along a longitudinal direction of the cylindrical projection 28b.