Monitoring method and manufacturing method of semiconductor device
A monitoring method that can detect a sign of disconnection of a heat generation source is provided. Further, a highly reliable semiconductor device is provided. The monitoring method uses a first control device that samples outputs of a plurality of thermometers at a first frequency (100 Hz samplin...
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| Zusammenfassung: | A monitoring method that can detect a sign of disconnection of a heat generation source is provided. Further, a highly reliable semiconductor device is provided. The monitoring method uses a first control device that samples outputs of a plurality of thermometers at a first frequency (100 Hz sampling in S10) and controls a plurality of heat generation sources based on temperature information obtained by sampling, and a second control device that forms information based on temperature information obtained by sampling at the first frequency (100 Hz sampling in S20) and pieces of heat-generation-source information obtained by sampling of outputs of the respective heat-generation sources at the first frequency (100 Hz sampling in S20). Based on the temperature information obtained by sampling at the first frequency (100 Hz sampling in S20) and the pieces of heat-generation-source information obtained by sampling at the first frequency (100 Hz sampling in S20), states of the heat generation sources are monitored. |
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