Interconnect structures for fine pitch assembly of semiconductor structures and related techniques

A semiconductor structure includes a substrate having first and second opposing surfaces and a plurality of electrical connections extending between the first and second surfaces. The semiconductor structure also includes one or more interconnect pads having first and second opposing surfaces and on...

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Bibliographische Detailangaben
Hauptverfasser: Das Rabindra N, Magoon Karen E, Barbieri Michael J, Murphy Peter G, Kinayman Noyan, Hancock Timothy M, Gouker Mark A
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A semiconductor structure includes a substrate having first and second opposing surfaces and a plurality of electrical connections extending between the first and second surfaces. The semiconductor structure also includes one or more interconnect pads having first and second opposing surfaces and one or more sides. The first surface of each one of the interconnect pads is disposed over or beneath select portions of at least the second surface of the substrate and is electrically coupled to select ones of the plurality of electrical connections. The semiconductor structure additionally includes an isolating layer having first and second opposing surfaces and openings formed in select portions of the isolating layer extending between the second surface of the isolating layer and the second surfaces of the interconnect pads. A corresponding method for fabricating a semiconductor structure is also provided.