Method for creating a resonator

A method for manufacturing a resonator in a substrate, including: a) modifying a structure of at least one region of the substrate to make the at least one region more selective; b) etching the at least one region to selectively manufacture the resonator.

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Bibliographische Detailangaben
Hauptverfasser:	Hessler Thierry, Dalla Piazza Silvio
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRONIC CIRCUITRY BLASTING CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING DECORATIVE ARTS ELECTRICITY ELECTROMECHANICAL CLOCKS OR WATCHES ELECTRONIC TIME-PIECES FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMSTHEREOF HEATING HOROLOGY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS LIGHTING MACHINE TOOLS MECHANICAL ENGINEERING MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL MECHANICALLY-DRIVEN CLOCKS OR WATCHES METAL-WORKING NOT OTHERWISE PROVIDED FOR MICROSTRUCTURAL TECHNOLOGY MOSAICS PAPERHANGING PERFORMING OPERATIONS PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS PRODUCING DECORATIVE EFFECTS RESONATORS SOLDERING OR UNSOLDERING STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHERARTICLES, NOT OTHERWISE PROVIDED FOR TARSIA WORK TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS TIME-INTERVAL MEASURING TRANSPORTING WEAPONS WELDING WORKING BY LASER BEAM
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Beschreibung
Zusammenfassung:	A method for manufacturing a resonator in a substrate, including: a) modifying a structure of at least one region of the substrate to make the at least one region more selective; b) etching the at least one region to selectively manufacture the resonator.