Micromechanical device for projecting an image and for analyzing an optical spectrum and corresponding manufacturing method

A micromechanical device for projecting an image and for analyzing an optical spectrum and a corresponding manufacturing method. The device includes: a first light providing unit by which a first light beam is providable to the device; a diffraction unit for diffract the first light beam provided to...

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1. Verfasser: Solf Christian
Format: Patent
Sprache:eng
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Zusammenfassung:A micromechanical device for projecting an image and for analyzing an optical spectrum and a corresponding manufacturing method. The device includes: a first light providing unit by which a first light beam is providable to the device; a diffraction unit for diffract the first light beam provided to the device as a function of a diffraction property of the diffraction unit; a second light providing unit by which a second light beam is providable to the device; a micromirror by which the second light beam provided to the device is variably deflectable as a function of a position and/or an orientation of the first micromirror; and a first actuator by which the adjustable diffraction property of the optical diffraction unit and also the position and/or the orientation of the micromirror are adjustable.